Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systems

ABSTRACT

A method of forming a microelectronic device comprises forming a microelectronic device structure comprising a first control logic region comprising first control logic devices, and a first memory array region vertically overlying the first control logic region and comprising an array of vertically extending strings of memory cells. An additional microelectronic device structure comprising a semiconductive material is attached to an upper surface of the microelectronic device structure. A portion of the semiconductive material is removed. A second control logic region is formed over the first memory array region. The second control logic region comprises second control logic devices and a remaining portion of the semiconductive material. A second memory array region is formed over the second control logic region. The second memory array region comprises an array of resistance variable memory cells. Microelectronic devices, memory devices, and electronic systems are also described.

TECHNICAL FIELD

The disclosure, in various embodiments, relates generally to the fieldof microelectronic device design and fabrication. More specifically, thedisclosure relates to methods of forming microelectronic devices andmemory devices, and to related microelectronic devices, memory devices,and electronic systems.

BACKGROUND

Microelectronic device designers often desire to increase the level ofintegration or density of features within a microelectronic device byreducing the dimensions of the individual features and by reducing theseparation distance between neighboring features. In addition,microelectronic device designers often desire to design architecturesthat are not only compact, but offer performance advantages, as well assimplified, easier and less expensive to fabricate designs.

One example of a microelectronic device is a memory device. Memorydevices are generally provided as internal integrated circuits incomputers or other electronic devices. There are many types of memorydevices including, but not limited to, non-volatile memory (NVM)devices, such as flash memory devices (e.g., NAND flash memory devices),and resistance variable memory devices (e.g., resistive random accessmemory (RRAM) devices, conductive bridge random access memory(conductive bridge RAM) devices, magnetic random access memory (MRAM)devices, phase change material (PCM) memory devices, phase change randomaccess memory (PCRAM) devices, spin-torque-transfer random access memory(STTRAM) devices, oxygen vacancy-based memory devices, programmableconductor memory devices).

Some non-volatile memory devices, such as many resistance variablememory devices, include a memory array exhibiting a cross-pointarchitecture including conductive lines (e.g., access lines, such asword lines) extending perpendicular (e.g., orthogonal) to additionalconductive lines (e.g., data lines, such as bit lines), and memory cellslocated at intersections of and interposed between the conductive linesand the additional conductive lines.

Additional non-volatile memory devices, such as many flash memorydevices, utilize vertical memory array (also referred to as a“three-dimensional (3D) memory array”) architectures. A conventionalvertical memory array includes strings of memory cells verticallyextending through one or more decks (e.g., stack structures) includingtiers of conductive materials and insulative materials. Each string ofmemory cells may include at least one select device coupled in series toa serial combination of vertically stacked memory cells. Such aconfiguration permits a greater number of switching devices (e.g.,transistors) to be located in a unit of die area (i.e., length and widthof active surface consumed) by building the array upwards (e.g.,vertically) on a die, as compared to structures with conventional planar(e.g., two-dimensional) arrangements of transistors.

Control logic devices within a base control logic structure underlying amemory array of a memory device (e.g., a non-volatile memory device)have been used to control operations (e.g., access operations, readoperations, write operations) on the memory cells of the memory device.An assembly of the control logic devices may be provided in electricalcommunication with the memory cells of the memory array by way ofrouting and interconnect structures. However, processing conditions(e.g., temperatures, pressures, materials) for the formation of thememory array over the base control logic structure can limit theconfigurations and performance of the control logic devices within thebase control logic structure. In addition, the quantities, dimensions,and arrangements of the different control logic devices employed withinthe base control logic structure can also undesirably impede reductionsto the size (e.g., horizontal footprint) of a memory device, and/orimprovements in the performance (e.g., faster memory cell ON/OFF speed,lower threshold switching voltage requirements, faster data transferrates, lower power consumption) of the memory device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A through 1F are simplified, partial cross-sectional viewsillustrating different processing stages of a method of forming amicroelectronic device, in accordance with embodiments of thedisclosure.

FIG. 2 is a schematic block diagram of an electronic system, inaccordance with an embodiment of the disclosure.

DETAILED DESCRIPTION

The following description provides specific details, such as materialcompositions, shapes, and sizes, in order to provide a thoroughdescription of embodiments of the disclosure. However, a person ofordinary skill in the art would understand that the embodiments of thedisclosure may be practiced without employing these specific details.Indeed, the embodiments of the disclosure may be practiced inconjunction with conventional microelectronic device fabricationtechniques employed in the industry. In addition, the descriptionprovided below does not form a complete process flow for manufacturing amicroelectronic device (e.g., a memory device). The structures describedbelow do not form a complete microelectronic device. Only those processacts and structures necessary to understand the embodiments of thedisclosure are described in detail below. Additional acts to form acomplete microelectronic device from the structures may be performed byconventional fabrication techniques.

Drawings presented herein are for illustrative purposes only, and arenot meant to be actual views of any particular material, component,structure, device, or system. Variations from the shapes depicted in thedrawings as a result, for example, of manufacturing techniques and/ortolerances, are to be expected. Thus, embodiments described herein arenot to be construed as being limited to the particular shapes or regionsas illustrated, but include deviations in shapes that result, forexample, from manufacturing. For example, a region illustrated ordescribed as box-shaped may have rough and/or nonlinear features, and aregion illustrated or described as round may include some rough and/orlinear features. Moreover, sharp angles that are illustrated may berounded, and vice versa. Thus, the regions illustrated in the figuresare schematic in nature, and their shapes are not intended to illustratethe precise shape of a region and do not limit the scope of the presentclaims. The drawings are not necessarily to scale. Additionally,elements common between figures may retain the same numericaldesignation.

As used herein, a “memory device” means and includes microelectronicdevices exhibiting memory functionality, but not necessarily limited tomemory functionality. Stated another way, and by way of non-limitingexample only, the term “memory device” includes not only conventionalmemory (e.g., conventional volatile memory; conventional non-volatilememory), but also includes an application specific integrated circuit(ASIC) (e.g., a system on a chip (SoC)), a microelectronic devicecombining logic and memory, and a graphics processing unit (GPU)incorporating memory.

As used herein, the term “configured” refers to a size, shape, materialcomposition, orientation, and arrangement of one or more of at least onestructure and at least one apparatus facilitating operation of one ormore of the structure and the apparatus in a pre-determined way.

As used herein, the terms “vertical,” “longitudinal,” “horizontal,” and“lateral” are in reference to a major plane of a structure and are notnecessarily defined by earth's gravitational field. A “horizontal” or“lateral” direction is a direction that is substantially parallel to themajor plane of the structure, while a “vertical” or “longitudinal”direction is a direction that is substantially perpendicular to themajor plane of the structure. The major plane of the structure isdefined by a surface of the structure having a relatively large areacompared to other surfaces of the structure. With reference to thefigures, a “horizontal” or “lateral” direction may be perpendicular toan indicated “Z” axis, and may be parallel to an indicated “X” axisand/or parallel to an indicated “Y” axis; and a “vertical” or“longitudinal” direction may be parallel to an indicated “Z” axis, maybe perpendicular to an indicated “X” axis, and may be perpendicular toan indicated “Y” axis.

As used herein, features (e.g., regions, structures, devices) describedas “neighboring” one another means and includes features of thedisclosed identity (or identities) that are located most proximate(e.g., closest to) one another. Additional features (e.g., additionalregions, additional structures, additional devices) not matching thedisclosed identity (or identities) of the “neighboring” features may bedisposed between the “neighboring” features. Put another way, the“neighboring” features may be positioned directly adjacent one another,such that no other feature intervenes between the “neighboring”features; or the “neighboring” features may be positioned indirectlyadjacent one another, such that at least one feature having an identityother than that associated with at least one the “neighboring” featuresis positioned between the “neighboring” features. Accordingly, featuresdescribed as “vertically neighboring” one another means and includesfeatures of the disclosed identity (or identities) that are located mostvertically proximate (e.g., vertically closest to) one another.Moreover, features described as “horizontally neighboring” one anothermeans and includes features of the disclosed identity (or identities)that are located most horizontally proximate (e.g., horizontally closestto) one another.

As used herein, spatially relative terms, such as “beneath,” “below,”“lower,” “bottom,” “above,” “upper,” “top,” “front,” “rear,” “left,”“right,” and the like, may be used for ease of description to describeone element's or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. Unless otherwise specified,the spatially relative terms are intended to encompass differentorientations of the materials in addition to the orientation depicted inthe figures. For example, if materials in the figures are inverted,elements described as “below” or “beneath” or “under” or “on bottom of”other elements or features would then be oriented “above” or “on top of”the other elements or features. Thus, the term “below” can encompassboth an orientation of above and below, depending on the context inwhich the term is used, which will be evident to one of ordinary skillin the art. The materials may be otherwise oriented (e.g., rotated 90degrees, inverted, flipped) and the spatially relative descriptors usedherein interpreted accordingly.

As used herein, the singular forms “a,” “an,” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

As used herein, “and/or” includes any and all combinations of one ormore of the associated listed items.

As used herein, the phrase “coupled to” refers to structures operativelyconnected with each other, such as electrically connected through adirect Ohmic connection or through an indirect connection (e.g., by wayof another structure).

As used herein, the term “substantially” in reference to a givenparameter, property, or condition means and includes to a degree thatone of ordinary skill in the art would understand that the givenparameter, property, or condition is met with a degree of variance, suchas within acceptable tolerances. By way of example, depending on theparticular parameter, property, or condition that is substantially met,the parameter, property, or condition may be at least 90.0 percent met,at least 95.0 percent met, at least 99.0 percent met, at least 99.9percent met, or even 100.0 percent met.

As used herein, “about” or “approximately” in reference to a numericalvalue for a particular parameter is inclusive of the numerical value anda degree of variance from the numerical value that one of ordinary skillin the art would understand is within acceptable tolerances for theparticular parameter. For example, “about” or “approximately” inreference to a numerical value may include additional numerical valueswithin a range of from 90.0 percent to 110.0 percent of the numericalvalue, such as within a range of from 95.0 percent to 105.0 percent ofthe numerical value, within a range of from 97.5 percent to 102.5percent of the numerical value, within a range of from 99.0 percent to101.0 percent of the numerical value, within a range of from 99.5percent to 100.5 percent of the numerical value, or within a range offrom 99.9 percent to 100.1 percent of the numerical value.

As used herein, “conductive material” means and includes electricallyconductive material such as one or more of a metal (e.g., tungsten (W),titanium (Ti), molybdenum (Mo), niobium (Nb), vanadium (V), hafnium(Hf), tantalum (Ta), chromium (Cr), zirconium (Zr), iron (Fe), ruthenium(Ru), osmium (Os), cobalt (Co), rhodium (Rh), iridium (Ir), nickel (Ni),palladium (Pa), platinum (Pt), copper (Cu), silver (Ag), gold (Au),aluminum (Al)), an alloy (e.g., a Co-based alloy, an Fe-based alloy, anNi-based alloy, an Fe- and Ni-based alloy, a Co- and Ni-based alloy, anFe- and Co-based alloy, a Co- and Ni- and Fe-based alloy, an Al-basedalloy, a Cu-based alloy, a magnesium (Mg)-based alloy, a Ti-based alloy,a steel, a low-carbon steel, a stainless steel), a conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide), and a conductively-doped semiconductor material (e.g.,conductively-doped polysilicon, conductively-doped germanium (Ge),conductively-doped silicon germanium (SiGe)). In addition, a “conductivestructure” means and includes a structure formed of and includingconductive material.

As used herein, “insulative material” means and includes electricallyinsulative material, such as one or more of at least one dielectricoxide material (e.g., one or more of a silicon oxide (SiO_(x)),phosphosilicate glass, borosilicate glass, borophosphosilicate glass,fluorosilicate glass, an aluminum oxide (AlO_(x)), a hafnium oxide(HfO_(x)), a niobium oxide (NbO_(x)—), a titanium oxide (TiO_(x)), azirconium oxide (ZrO_(x)), a tantalum oxide (TaO_(x)), and a magnesiumoxide (MgO_(x))), at least one dielectric nitride material (e.g., asilicon nitride (SiN_(y))), at least one dielectric oxynitride material(e.g., a silicon oxynitride (SiO_(x)N_(y))), at least one dielectricoxycarbide material (e.g., silicon oxycarbide (SiO_(x)C_(y))), at leastone hydrogenated dielectric oxycarbide material (e.g., hydrogenatedsilicon oxycarbide (SiC_(x)O_(y)Hz)), and at least one dielectriccarboxynitride material (e.g., a silicon carboxynitride(SiO_(x)C_(z)N_(y))). Formulae including one or more of “x” “y,” and “z”herein (e.g., SiO_(x), AlO_(x), HfO_(x), NbO_(x), TiO_(x), SiN_(y),SiO_(x)N_(y), SiO_(x)C_(y), SiC_(x)O_(y)H_(z), SiO_(x)C_(z)N_(y))represent a material that contains an average ratio of “x” atoms of oneelement, “y” atoms of another element, and “z” atoms of an additionalelement (if any) for every one atom of another element (e.g., Si, Al,Hf, Nb, Ti). As the formulae are representative of relative atomicratios and not strict chemical structure, an insulative material maycomprise one or more stoichiometric compounds and/or one or morenon-stoichiometric compounds, and values of “x”, “y”, “x,” “y,” and “z”(if any) may be integers or may be non-integers. As used herein, theterm “non-stoichiometric compound” means and includes a chemicalcompound with an elemental composition that cannot be represented by aratio of well-defined natural numbers and is in violation of the law ofdefinite proportions. In addition, an “insulative structure” means andincludes a structure formed of and including insulative material.

As used herein, the term “homogeneous” means relative amounts ofelements included in a feature (e.g., a material, a structure) do notvary throughout different portions (e.g., different horizontal portions,different vertical portions) of the feature. Conversely, as used herein,the term “heterogeneous” means relative amounts of elements included ina feature (e.g., a material, a structure) vary throughout differentportions of the feature. If a feature is heterogeneous, amounts of oneor more elements included in the feature may vary stepwise (e.g., changeabruptly), or may vary continuously (e.g., change progressively, such aslinearly, parabolically) throughout different portions of the feature.The feature may, for example, be formed of and include a stack of atleast two different materials.

Unless the context indicates otherwise, the materials described hereinmay be formed by any suitable technique including, but not limited to,spin coating, blanket coating, chemical vapor deposition (CVD), plasmaenhanced CVD (PECVD), atomic layer deposition (ALD), plasma enhanced ALD(PEALD), physical vapor deposition (PVD) (e.g., sputtering), orepitaxial growth. Depending on the specific material to be formed, thetechnique for depositing or growing the material may be selected by aperson of ordinary skill in the art. In addition, unless the contextindicates otherwise, removal of materials described herein may beaccomplished by any suitable technique including, but not limited to,etching (e.g., dry etching, wet etching, vapor etching), ion milling,abrasive planarization (e.g., chemical-mechanical planarization (CMP)),or other known methods.

FIGS. 1A through 1F are simplified, partial cross-sectional viewsillustrating different processing stages of a method of forming amicroelectronic device (e.g., a memory device), in accordance withembodiments of the disclosure. The microelectronic device may be formedto include a combination of cross-point and 3D NAND Flash memoryarchitectures. In addition, the microelectronic device may be formed toinclude multiple control logic regions including different control logicdevice configurations and operational functions than one another. Withthe description provided below, it will be readily apparent to one ofordinary skill in the art that the methods and structures describedherein may be used to form various devices and electronic systems.

Referring to FIG. 1A, a microelectronic device structure 100 may beformed to include a semiconductive base structure 102, a first controllogic region 104 at least partially over the semiconductive basestructure 102, and a first memory array region 106 over the firstcontrol logic region 104. The first control logic region 104 includes aportion of the semiconductive base structure 102, as well as firsttransistors 108, and first contact structures 110. The first transistors108, the first contact structures 110, and associated conductive routingstructures may form control logic circuitry of various first controllogic devices 112 of the first control logic region 104, as described infurther detail below. The first memory array region 106 includes a stackstructure 114, deep contact structures 116 and cell pillar structures118 vertically extending through the stack structure 114, a source tier120 under the stack structure 114, digit line structures 122 (e.g., bitline structures, data line structures) over the stack structure 114,insulative line structures 124 over the digit line structures 122, andsecond contact structures 126 (e.g., digit line contact structures)vertically extending through the insulative line structures 124 to thedigit line structures 122. The microelectronic device structure 100(including the semiconductive base structure 102, the first controllogic region 104, and the first memory array region 106 thereof)includes additional features (e.g., structures, materials, devices), asdescribed in further detail below.

The semiconductive base structure 102 comprises a base material orconstruction upon which additional features (e.g., materials,structures, devices) of the microelectronic device structure 100 areformed. The semiconductive base structure 102 may comprise asemiconductive structure (e.g., a semiconductive wafer), or a basesemiconductive material on a supporting structure. For example, thesemiconductive base structure 102 may comprise a conventional siliconsubstrate (e.g., a conventional silicon wafer), or another bulksubstrate comprising a semiconductive material. In some embodiments, thesemiconductive base structure 102 comprises a silicon wafer. Thesemiconductive base structure 102 may include one or more layers,structures, and/or regions formed therein and/or thereon.

As shown in FIG. 1A, one or more filled trenches 128 (e.g., filledopenings, filled vias, filled apertures) may formed to vertically extend(e.g., in the Z-direction) partially (e.g., less than completely)through the semiconductive base structure 102. If formed, each of thefilled trenches 128 may be formed to exhibit substantially the samedimensions and shape as each other of the filled trenches 128, or atleast one of the filled trenches 128 may be formed to exhibit one ormore of different dimensions and a different shape than at least oneother of the filled trenches 128. As a non-limiting example, each of thefilled trenches 128 may be formed to exhibit substantially the samevertical dimension(s) and substantially the same verticalcross-sectional shape(s) as each other of the filled trenches 128; or atleast one of the filled trenches 128 may be formed to exhibit one ormore of different vertical dimension(s) and different verticalcross-sectional shape(s) than at least one other of the filled trenches128. In some embodiments, at least one of the filled trenches 128 isformed to vertically extend to and terminate at a relatively deeperdepth within the semiconductive base structure 102 than at least oneother of the filled trenches 128. In additional embodiments, the filledtrenches 128 are all formed to vertically extend to and terminate atsubstantially the same depth within the semiconductive base structure102. As another non-limiting example, each of the filled trenches 128may be formed to exhibit substantially the same horizontal dimension(s)and substantially the same horizontal cross-sectional shape(s) as eachother of the filled trenches 128; or at least one of the filled trenches128 may be formed to exhibit one or more of different horizontaldimension(s) (e.g., relatively larger horizontal dimension(s),relatively smaller horizontal dimension(s)) and different horizontalcross-sectional shape(s) than at least one other of the filled trenches128.

If formed, the filled trenches 128 may be substantially filled with oneor more materials, such as one or more of at least one insulativematerial, at least one conductive material, and at least onesemiconductive material. In some embodiments, at least one (e.g., each)of the filled trenches 128 is filled with at least one insulativematerial. At least one (e.g., each) of the filled trenches 128 may, forexample, be employed as a shallow trench isolation (STI) structurewithin the semiconductive base structure 102. In additional embodiments,at least one (e.g., each) of the filled trenches 128 is filled with atleast one conductive material. At least one of the filled trenches 128may, for example, be employed to facilitate electrical connectionbetween one or more components of the microelectronic device structure100 at a first side (e.g., a front side, a top side) of thesemiconductive base structure 102 and additional components (e.g., oneor more structures and/or devices) to be provided at a second, opposingside (e.g., a back side, a bottom side) of the semiconductive basestructure 102 following subsequent processing of the semiconductive basestructure 102. In additional embodiments, the filled trenches 128 areomitted (e.g., absent) from the semiconductive base structure 102.

Still referring to FIG. 1A, the first transistors 108 of the firstcontrol logic region 104 may be formed to include conductively dopedregions 132 (e.g., serving as source regions and drain regions of thefirst transistors 108) within the semiconductive base structure 102,channel regions 130 within the semiconductive base structure 102 andhorizontally interposed between the conductively doped regions 132, andgate structures 134 vertically overlying the channel regions 130. Thefirst transistors 108 may also include gate dielectric material (e.g., adielectric oxide) formed to vertically intervene (e.g., in theZ-direction) between the gate structures 134 and the channel regions130.

For the first transistors 108 of the first control logic region 104, theconductively doped regions 132 within the semiconductive base structure102 may be doped with one or more desired dopants (e.g., chemicalspecies). In some embodiments, the conductively doped regions 132 aredoped with at least one N-type dopant (e.g., one or more of phosphorus(P), arsenic (As), antimony (Sb), and bismuth (Bi)). In some of suchembodiments, the channel regions 130 within the semiconductive basestructure 102 are doped with at least one P-type dopant (e.g., one ormore of boron (B), aluminum (Al), and gallium (Ga)). In some other ofsuch embodiments, the channel regions 130 within the semiconductive basestructure 102 are substantially undoped. In additional embodiments, theconductively doped regions 132 are doped with at least one P-type dopant(e.g., one or more of B, Al, and Ga). In some of such additionalembodiments, the channel regions 130 within the semiconductive basestructure 102 are doped with at least one N-type dopant (e.g., one ormore of P, As, Sb, and Bi). In some other of such additionalembodiments, the channel regions 130 within the semiconductive basestructure 102 are substantially undoped.

The gate structures 134 may individually horizontally extend (e.g., inthe Y-direction) between and be employed by multiple first transistors108 of the first control logic region 104. The gate structures 134 maybe formed of and include conductive material. In some embodiments, thegate structures 134 are individually formed of and include W. The gatestructures 134 may individually be substantially homogeneous, or thegate structures 134 may individually be heterogeneous. In someembodiments, the gate structures 134 are each substantially homogeneous.In additional embodiments, the gate structures 134 are eachheterogeneous. Individual gate structures 134 may, for example, beformed of and include a stack of at least two different conductivematerials.

Still referring to FIG. 1C, the first contact structures 110 may beformed to vertically extend between and couple the conductively dopedregions 132 within the semiconductive base structure 102 (and, hence,the first transistors 108) to one or more conductive routing structuresof the first control logic region 104. The first contact structures 110may each individually be formed of and include conductive material. Byway of non-limiting example, the first contact structures 110 may beformed of and include one or more of at least one metal, at least onealloy, and at least one conductive metal-containing material (e.g., aconductive metal nitride, a conductive metal silicide, a conductivemetal carbide, a conductive metal oxide). In some embodiments, the firstcontact structures 110 are formed of and include W. In additionalembodiments, the first contact structures 110 are formed of and includeCu.

As previously mentioned, the first transistors 108, the first contactstructures 110, and conductive routing structures operatively associatedtherewith form control logic circuitry of various first control logicdevices 112 of the first control logic region 104. In some embodiments,the first control logic devices 112 comprise complementarymetal-oxide-semiconductor (CMOS) circuitry. The first control logicdevices 112 may be configured to control various operations ofcomponents (e.g., components within the first memory array region 106,components of at least one additional memory array region tosubsequently be formed) of a microelectronic device (e.g., a memorydevice) formed to include to the microelectronic device structure 100.The first control logic devices 112 included in the first control logicregion 104 may be selected relative to additional control logic devices(e.g., second control logic devices) included in the one or moreadditional control logic region(s) to subsequently be formed, asdescribed in further detail below. Configurations of the first controllogic devices 112 included in the first control logic region 104 may bedifferent than configurations of additional control logic devicesincluded in the additional control logic region(s). In some embodiments,the additional control logic devices included in the additional controllogic region(s) comprise relatively high performance control logicdevices employing relatively high performance control logic circuitry(e.g., relatively high performance CMOS circuitry); and the firstcontrol logic devices 112 included in the first control logic region 104employ relatively lower performance control logic circuitry (e.g.,additional CMOS circuitry). The additional control logic devices withinthe additional control logic region(s) may, for example, be configuredto operate at applied voltages less than or equal to (e.g., less than)about 1.4 volts (V), such as within a range of from about 0.7 V to about1.4 V (e.g., from about 0.7 V to about 1.3 V, from about 0.7 V to about1.2 V, from about 0.9 V to about 1.2 V, from about 0.95 V to about 1.15V, or about 1.1 V); and the first control logic devices 112 within thefirst control logic region 104 may be configured to operate at appliedvoltages above upper operational voltages of additional control logicdevices within the additional control logic regions(s), such as atapplied voltages greater than about 1.2 V (e.g., greater than or equalto about 1.3 V, greater than or equal to about 1.4 V).

As a non-limiting example, the first control logic devices 112 includedwithin the first control logic region 104 of the microelectronic devicestructure 100 may include one or more (e.g., each) of charge pumps(e.g., V_(CCP) charge pumps, V_(NEGWL) charge pumps, DVC2 charge pumps),delay-locked loop (DLL) circuitry (e.g., ring oscillators), drain supplyvoltage (V_(dd)) regulators, string drivers, page buffers, and variouschip/deck control circuitry. As another non-limiting example, the firstcontrol logic devices 112 may include devices configured to controlcolumn operations for arrays (e.g., memory arrays) within one or more(e.g., each) of the first memory array region 106 and one or moreadditional memory array region(s) to subsequently be formed, such as oneor more (e.g., each) of decoders (e.g., local deck decoders, columndecoders), sense amplifiers (e.g., equalization (EQ) amplifiers,isolation (ISO) amplifiers, NMOS sense amplifiers (NSAs), PMOS senseamplifiers (PSAs)), repair circuitry (e.g., column repair circuitry),I/O devices (e.g., local I/O devices), memory test devices, arraymultiplexers (MUX), and error checking and correction (ECC) devices. Asa further non-limiting example, the first control logic devices 112 mayinclude devices configured to control row operations for arrays (e.g.,memory arrays) within one or more (e.g., each) of the first memory arrayregion 106 and the additional memory array region(s) to subsequently beformed, such as one or more (e.g., each) of decoders (e.g., local deckdecoders, row decoders), drivers (e.g., word line (WL) drivers), repaircircuitry (e.g., row repair circuitry), memory test devices, MUX, ECCdevices, and self-refresh/wear leveling devices.

With continued reference to FIG. 1A, the source tier 120 may bevertically interposed between the first control logic devices 112 of thefirst control logic region 104 and the stack structure 114 of the firstmemory array region 106 overlying the first control logic region 104.The source tier 120 may include at least one source structure 136 (e.g.,a source plate), and at least one contact pad 138. The sourcestructure(s) 136 and the contact pad(s) 138 may horizontally neighborone another (e.g., in the X-direction, in the Y-direction) within thesource tier 120. The source structure(s) 136 may be electricallyisolated from the contact pad(s) 138, and may be positioned atsubstantially the same vertical position (e.g., in the Z-direction) asthe contact pad(s) 138. At least one insulative material (e.g., aportion of the isolation material 150) may be interposed between thesource structure(s) 136 and the contact pad(s) 138 of the source tier120.

The source structure(s) 136 and the contact pad(s) 138 of the sourcetier 120 may each be formed of and include conductive material. Amaterial composition of the source structure(s) 136 may be substantiallythe same as a material composition of the contact pad(s) 138. In someembodiments, the source structure(s) 136 and the contact pad(s) 138 areformed of and include one or more of a metal, an alloy, and a conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide). As a non-limiting example, the source structure(s) 136 andthe contact pad(s) 138 may be formed of and include W. In additionalembodiments, the source structure(s) 136 and the contact pad(s) 138 areformed of and include conductively doped semiconductive material, suchas a conductively doped form of one or more of a silicon material, suchas monocrystalline silicon or polycrystalline silicon; asilicon-germanium material; a germanium material; a gallium arsenidematerial; a germanium material; a gallium arsenide material; a galliumnitride material; and an indium phosphide material. As a non-limitingexample, the source structure(s) 136 and the contact pad(s) 138 may beformed of and include silicon (e.g., polycrystalline silicon) doped withat least one dopant (e.g., one or more of at least one n-type dopant, atleast one p-type dopant, and at least another dopant).

As shown in FIG. 1A, the source structure(s) 136 and the contact pad(s)138 of the source tier 120 may be coupled to control logic circuitry(including first transistors 108 and first contact structures 110thereof) of the first control logic devices 112 of the first controllogic region 104. The source structure(s) 136 and the contact pad(s) 138of the source tier 120 may also individually be coupled to one or moreof the deep contact structures 116 of the first memory array region 106.In addition, the source structure(s) 136 of the source tier 120 may becoupled to the cell pillar structures 118 of the first memory arrayregion 106. In some embodiments, the source structure(s) 136 directlyphysically contacts the cell pillar structures 118. In additionalembodiments, contact structures may vertically intervene between thesource structure(s) 136 and the cell pillar structures 118.

Still referring to FIG. 1A, the stack structure 114 of the first memoryarray region 106 may be formed to vertically overlie the source tier120, and may include a vertically alternating (e.g., in the Z-direction)sequence of conductive structures 140 and insulative structures 142arranged in tiers 144. Each of the tiers 144 of the stack structure 114may include at least one of the conductive structures 140 verticallyneighboring at least one of the insulative structures 142. The stackstructure 114 may be formed to include any desired number of the tiers144, such as greater than or equal to sixteen (16) of the tiers 144,greater than or equal to thirty-two (32) of the tiers 144, greater thanor equal to sixty-four (64) of the tiers 144, greater than or equal toone hundred and twenty-eight (128) of the tiers 144, or greater than orequal to two hundred and fifty-six (256) of the tiers 144.

The conductive structures 140 of the tiers 144 of the stack structure114 may be formed of and include conductive material. By way ofnon-limiting example, the conductive structures 140 may eachindividually be formed of and include a metallic material comprising oneor more of at least one metal, at least one alloy, and at least oneconductive metal-containing material (e.g., a conductive metal nitride,a conductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the conductive structures 140 areformed of and include W. Each of the conductive structures 140 mayindividually be substantially homogeneous, or one or more of theconductive structures 140 may individually be substantiallyheterogeneous. In some embodiments, each of the conductive structures140 is formed to be substantially homogeneous. In additionalembodiments, each of the conductive structures 140 is formed to beheterogeneous. Each conductive structure 140 may, for example, be formedof and include a stack of at least two different conductive materials.

Optionally, one or more liner materials (e.g., insulative linermaterial(s), conductive liner material(s)) may also be formed around theconductive structures 140. The liner material(s) may, for example, beformed of and include one or more of a metal (e.g., titanium, tantalum),an alloy, a metal nitride (e.g., tungsten nitride, titanium nitride,tantalum nitride), and a metal oxide (e.g., aluminum oxide). In someembodiments, the liner material(s) comprise at least one conductivematerial employed as a seed material for the formation of the conductivestructures 140. In some embodiments, the liner material(s) comprisetitanium nitride. In further embodiments, the liner material(s) furtherincludes aluminum oxide. As a non-limiting example, aluminum oxide maybe formed directly adjacent the insulative structures 142, titaniumnitride may be formed directly adjacent the aluminum oxide, and tungstenmay be formed directly adjacent the titanium nitride. For clarity andease of understanding the description, the liner material(s) are notillustrated in FIG. 1A, but it will be understood that the linermaterial(s) may be disposed around the conductive structures 140.

The insulative structures 142 of the tiers 144 of the stack structure114 may be formed of and include at least one insulative material, suchas one or more of at least one dielectric oxide material (e.g., one ormore of SiO_(x), phosphosilicate glass, borosilicate glass,borophosphosilicate glass, fluorosilicate glass, AlO_(x), HfO_(x),NbO_(x), TiO_(x), ZrO_(x), TaO_(x), and MgO_(x)), at least onedielectric nitride material (e.g., SiN_(y)), at least one dielectricoxynitride material (e.g., SiO_(x)N_(y)), and at least one dielectriccarboxynitride material (e.g., SiO_(x)C_(z)N_(y)). In some embodiments,each of the insulative structures 142 is formed of and includes adielectric oxide material, such as SiO_(x) (e.g., SiO₂). Each of theinsulative structures 142 may individually be substantially homogeneous,may be substantially heterogeneous. In some embodiments, each of theinsulative structures 142 is substantially homogeneous. In furtherembodiments, at least one of the insulative structures 142 issubstantially heterogeneous. One or more of the insulative structures142 may, for example, be formed of and include a stack (e.g., laminate)of at least two different insulative materials.

The cell pillar structures 118 may vertically extend through the tiers144 of the stack structure 114. The cell pillar structures 118 may eachindividually be formed of and include a stack of materials. By way ofnon-limiting example, each of the cell pillar structures 118 may beformed to include a charge-blocking material, such as first dielectricoxide material (e.g., SiO_(x), such as SiO₂; AlO_(x), such as Al₂O₃); acharge-trapping material, such as a dielectric nitride material (e.g.,SiN_(y), such as Si₃N₄); a tunnel dielectric material, such as a secondoxide dielectric material (e.g., SiO_(x), such as SiO₂); a channelmaterial, such as a semiconductive material (e.g., silicon, such aspolycrystalline Si); and a dielectric fill material (e.g., a dielectricoxide, a dielectric nitride, air). The charge-blocking material may beformed on or over surfaces of the conductive structures 140 and theinsulative structures 142 of the tiers 144 of stack structure 114 atleast partially defining horizontal boundaries of the cell pillarstructures 118; the charge-trapping material may be horizontallysurrounded by the charge-blocking material; the tunnel dielectricmaterial may be horizontally surrounded by the charge-trapping material;the channel material may be horizontally surrounded by the tunneldielectric material; and the dielectric fill material may behorizontally surrounded by the channel material.

With continued reference to FIG. 1A, intersections of the cell pillarstructures 118 and the conductive structures 140 of the tiers 144 of thestack structure 114 may define vertically extending strings of memorycells 146 coupled in series with one another within the stack structure114. In some embodiments, the memory cells 146 formed at theintersections of the conductive structures 140 and the cell pillarstructures 118 within different tiers 144 of the stack structure 114comprise so-called “MONOS” (metal-oxide-nitride-oxide-semiconductor)memory cells. In additional embodiments, the memory cells 146 compriseso-called “TANOS” (tantalum nitride-aluminumoxide-nitride-oxide-semiconductor) memory cells, or so-called “BETANOS”(band/barrier engineered TANOS) memory cells, each of which are subsetsof MONOS memory cells. In further embodiments, the memory cells 146comprise so-called “floating gate” memory cells including floating gates(e.g., metallic floating gates) as charge storage structures. Thefloating gates may horizontally intervene between central structures ofthe cell pillar structures 118 and the conductive structures 140 of thedifferent tiers 144 of the stack structure 114.

As shown in FIG. 1A, the deep contact structures 116 may also verticallyextend through the tiers 144 of the stack structure 114. The deepcontact structures 116 may be configured and positioned to electricallyconnect one or more features (e.g., structures, material, devices) ofthe microelectronic device structure 100 vertically overlying the stackstructure 114 with one or more additional features of themicroelectronic device structure 100 vertically underlying the stackstructure 114. The deep contact structures 116 may be formed of andinclude conductive material. In some embodiments, the deep contactstructures 116 are formed of and include W. In additional embodiments,the deep contact structures 116 are formed of and include conductivelydoped polycrystalline silicon.

Still referring to FIG. 1A, insulative liner structures 148 may beformed to substantially continuously extend over and substantially coverside surfaces of the deep contact structures 116. The insulative linerstructures 148 may be horizontally interposed between the deep contactstructures 116 and the conductive structures 140 (and the insulativestructures 142) of the tiers 144 of the stack structure 114. Theinsulative liner structures 148 may be formed over and include at leastone insulative material, such as one or more of at least one dielectricoxide material (e.g., one or more of SiO_(x), phosphosilicate glass,borosilicate glass, borophosphosilicate glass, fluorosilicate glass,AlO_(x), HfO_(x), NbO_(x), TiO_(x), ZrO_(x), TaO_(x), and a MgO_(x)), atleast one dielectric nitride material (e.g., SiN_(y)), at least onedielectric oxynitride material (e.g., SiO_(x)N_(y)), and at least onedielectric carboxynitride material (e.g., SiO_(x)C_(z)N_(y)). In someembodiments, each of the insulative liner structures 148 is formed ofand includes at least one dielectric oxide material (e.g., SiO_(x), suchas SiO₂).

The digit line structures 122 may be formed vertically over and inelectrical communication with the cell pillar structures 118 (and,hence, the vertically extending strings of memory cells 146) and thedeep contact structures 116. The digit line structures 122 may exhibithorizontally elongate shapes extending in parallel in a first horizontaldirection (e.g., the Y-direction). As used herein, the term “parallel”means substantially parallel. The digit line structures 122 may eachexhibit substantially the same dimensions (e.g., width in theX-direction, length in a Y-direction, height in the Z-direction), shape,and spacing (e.g., in the X-direction). In additional embodiments, oneor more of the digit line structures 122 may exhibit one or more of atleast one different dimension (e.g., a different length, a differentwidth, a different height) and a different shape than one or more otherof the digit line structures 122, and/or the spacing (e.g., in theX-direction) between at least two horizontally neighboring digit linestructures 122 may be different than the spacing between at least twoother horizontally neighboring digit line structures 122.

The digit line structures 122 may be formed of and include conductivematerial. By way of non-limiting example, the digit line structures 122may each individually be formed of and include a metallic materialcomprising one or more of at least one metal, at least one alloy, and atleast one conductive metal-containing material (e.g., a conductive metalnitride, a conductive metal silicide, a conductive metal carbide, aconductive metal oxide). In some embodiments, the digit line structures122 are each individually formed of and include W. Each of the digitline structures 122 may individually be substantially homogeneous, orone or more of the digit line structures 122 may individually besubstantially heterogeneous. In some embodiments, each of the digit linestructures 122 is substantially homogeneous. In additional embodiments,each of the digit line structures 122 is heterogeneous. Each digit linestructure 122 may, for example, be formed of and include a stack of atleast two different conductive materials.

The insulative line structures 124 may be formed on or over the digitline structures 122. The insulative line structures 124 may serve asinsulative cap structures (e.g., dielectric cap structures) for thedigit line structures 122. The insulative line structures 124 may havehorizontally elongate shapes extending in parallel in the firsthorizontal direction (e.g., the Y-direction). Horizontal dimensions,horizontal pathing, and horizontal spacing of the insulative linestructures 124 may be substantially the same as the horizontaldimensions, horizontal pathing, and horizontal spacing of the digit linestructures 122.

The insulative line structures 124 may be formed of and includeinsulative material. By way of non-limiting example, the insulative linestructures 124 may each individually be formed of and include adielectric nitride material, such as SiN_(y) (e.g., Si₃N₄). Theinsulative line structures 124 may each be substantially homogeneous, orone or more of the insulative line structures 124 may be heterogeneous.In some embodiments, each of the insulative line structures 124 issubstantially homogeneous. In additional embodiments, each of theinsulative line structures 124 is heterogeneous. Each insulative linestructure 124 may, for example, be formed of and include a stack of atleast two different dielectric materials.

The second contact structures 126 may be formed to vertically extendthrough the insulative line structures 124, and may contact the digitline structures 122. For each digit line contact structure 122, a firstportion thereof may vertically overlie one of the insulative linestructures 124, and a second portion thereof may vertically extendthrough the insulative line structure 124 and contact (e.g., physicallycontact, electrically contact) one of the digit line structures 122. Theindividual second contact structures 126 may be at least partially(e.g., substantially) horizontally aligned in the X-direction withindividual insulative line structures 124 (and, hence, individual digitline structures 122). For example, horizontal centerlines of the secondcontact structures 126 in the X-direction may be substantially alignedwith horizontal centerlines of the insulative line structures 124 in theX-direction. In addition, the second contact structures 126 may beformed at desired locations in the Y-direction along the insulative linestructures 124 (and, hence, the digit line structures 122). In someembodiments, at least some of the second contact structures 126 areprovided at different positions in the Y-direction than one another. Forexample, a first of the second contact structures 126 may be provided atdifferent position along a length in the Y-direction of a first of theinsulative line structures 124 as compared to a position of a second ofthe second contact structures 126 along a length in the Y-direction of asecond of the insulative line structures 124. Put another way, at leastsome (e.g., all) of the second contact structures 126 may behorizontally offset from one another in the Y-direction. In additionalembodiments, two or more of the second contact structures 126 arehorizontally aligned with one another in the Y-direction. In someembodiments, the second contact structures 126 are employed as digitline contact structures (e.g., data line contact structures, bit linecontact structures) for a microelectronic device (e.g., a memory device)to be formed using the microelectronic device structure 100.

The second contact structures 126 may each individually be formed of andinclude conductive material. By way of non-limiting example, the secondcontact structures 126 may be formed of and include one or more of atleast one metal, at least one alloy, and at least one conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the second contact structures 126 areformed of and include Cu. In additional embodiments, the second contactstructures 126 are formed of and include W.

Still referring to FIG. 1A, at least one isolation material 150 may beformed to cover and surround of portions of the semiconductive basestructure 102, the first transistors 108, the first contact structures110, the source structure(s) 136, the contact pad(s) 138, stackstructure 114 (including the conductive structures 140 and theinsulative structures 142 thereof), the digit line structures 122, theinsulative line structures 124, and the second contact structures 126.The isolation material 150 may be formed of and include at least oneinsulative material. By way of non-limiting example, the isolationmaterial 150 may be formed of and include one or more of at least onedielectric oxide material (e.g., one or more of SiO_(x), phosphosilicateglass, borosilicate glass, borophosphosilicate glass, fluorosilicateglass, AlO_(x), HfO_(x), NbO_(x), and TiO_(x)), at least one dielectricnitride material (e.g., SiN_(y)), at least one dielectric oxynitridematerial (e.g., SiO_(x)N_(y)), at least one dielectric carboxynitridematerial (e.g., SiO_(x)C_(z)N_(y)), and amorphous carbon. In someembodiments, the isolation material 150 is formed of and includesSiO_(x) (e.g., SiO₂). The isolation material 150 may be substantiallyhomogeneous, or the isolation material 150 may be heterogeneous. If theisolation material 150 is heterogeneous, amounts of one or more elementsincluded in the isolation material 150 may vary stepwise (e.g., changeabruptly), or may vary continuously (e.g., change progressively, such aslinearly, parabolically) throughout different portions of the isolationmaterial 150. In some embodiments, the isolation material 150 issubstantially homogeneous. In additional embodiments, the isolationmaterial 150 is heterogeneous. The isolation material 150 may, forexample, be formed of and include a stack of at least two differentdielectric materials.

With continued reference to FIG. 1A, at least one dielectric structure152 may be formed on or over upper surfaces of the second contactstructures 126. The dielectric structure 152 may exhibit a substantiallyplanar upper surface, and may be employed for a subsequent bondingprocess, as described in further detail below. The dielectric structure152 may be formed of and include at least one insulative material. Amaterial composition of the dielectric structure 152 may besubstantially the same as a material composition of the isolationmaterial 150, or may be different than the material composition of theisolation material 150. The dielectric structure 152 may comprise aportion of the isolation material 150 vertically overlying uppersurfaces of the second contact structures 126, or may comprise anadditional structure formed on or over upper surfaces of the secondcontact structures 126 and the isolation material 150. In someembodiments, the dielectric structure 152 is formed of and includes adielectric oxide material, such as SiO_(x) (e.g., SiO₂). The dielectricstructure 152 may be substantially homogeneous, or the dielectricstructure 152 may be heterogeneous. In some embodiments, the dielectricstructure 152 is substantially homogeneous. In additional embodiments,the dielectric structure 152 is heterogeneous. The dielectric structure152 may, for example, be formed of and include a stack of at least twodifferent dielectric materials.

Referring next to FIG. 1B, the microelectronic device structure 100 maybe attached (e.g., bonded) to an additional microelectronic devicestructure 154 to form a microelectronic device structure assembly 156.The additional microelectronic device structure 154 may include anadditional semiconductive base structure 158 and an additionaldielectric structure 160 formed on, over, or within the additionalsemiconductive base structure 158. As shown in FIG. 1B, the additionalmicroelectronic device structure 154 may be vertically inverted (e.g.,flipped upside down in the Z-direction) and the additional dielectricstructure 160 thereof may be attached (e.g., bonded, such as throughoxide-oxide bonding) to the dielectric structure 152 of themicroelectronic device structure 100 to form the microelectronic devicestructure assembly 156. Attaching (e.g., bonding) the additionaldielectric structure 160 of the additional microelectronic devicestructure 154 to the dielectric structure 152 of the microelectronicdevice structure 100 may form a connected dielectric structure 162 ofthe microelectronic device structure assembly 156. Alternatively, themicroelectronic device structure 100 may be vertically inverted (e.g.,flipped upside down in the Z-direction) and attached to the additionalmicroelectronic device structure 154 to form the microelectronic devicestructure assembly 156.

The additional semiconductive base structure 158 of the additionalmicroelectronic device structure 154 comprises a base material orconstruction upon which additional features (e.g., materials,structures, devices) are formed. In some embodiments, the additionalsemiconductive base structure 158 comprises a wafer. The additionalsemiconductive base structure 158 may be formed of and include asemiconductive material (e.g., one or more of a silicon material, asmonocrystalline silicon or polycrystalline silicon (also referred toherein as “polysilicon”); silicon-germanium; germanium; galliumarsenide; a gallium nitride; gallium phosphide; indium phosphide; indiumgallium nitride; and aluminum gallium nitride). By way of non-limitingexample, the additional semiconductive base structure 158 may comprise asemiconductive wafer (e.g., a silicon wafer). The additionalsemiconductive base structure 158 may include one or more layers,structures, and/or regions formed therein and/or thereon.

As shown in FIG. 1B, optionally, the additional semiconductive basestructure 158 may include at least one detachment region 164 thereinconfigured to promote or facilitate detachment of a portion 158A of theadditional semiconductive base structure 158 proximate (e.g., adjacent)the additional dielectric structure 160 from an additional portion 158Bof the additional semiconductive base structure 158 relative more distalfrom the additional dielectric structure 160. By way of non-limitingexample, the detachment region 164 may include one one or more ofdopants (e.g., hydrogen), void spaces, and/or structural features (e.g.,defects, damage) promoting or facilitating subsequent detachment of theportion 158A from the additional portion 158B, as described in furtherdetail below. The vertical depth (e.g., in the Z-direction) of thedetachment region 164 within the additional semiconductive basestructure 158 may correspond to desired vertical height of the portion158A of the additional semiconductive base structure 158. The verticalheight of the portion 158A may be selected at least partially based ondesired configuration of additional features (e.g., structures,materials, devices) to be formed using the portion 158A of theadditional semiconductive base structure 158 following the detachmentthereof from the additional portion 158B of the additionalsemiconductive base structure 158. In additional embodiments, thedetachment region 164 is absent from the additional semiconductive basestructure 158. In some of such embodiments, the additional portion 158Bof the additional semiconductive base structure 158 may subsequently beremoved relative to the portion 158A of the additional semiconductivebase structure 158 through a different process (e.g., anon-detachment-based process, such as a conventional grinding process).

The additional dielectric structure 160 of the additionalmicroelectronic device structure 154 may be formed of and include atleast one insulative material. A material composition of the additionaldielectric structure 160 of the additional microelectronic devicestructure 154 may be substantially the same as a material composition ofthe dielectric structure 152 of the microelectronic device structure100, or may be different than the material composition of the dielectricstructure 152 of the microelectronic device structure 100. In someembodiments, the additional dielectric structure 160 is formed of andincludes a dielectric oxide material, such as SiO_(x) (e.g., SiO₂). Theadditional dielectric structure 160 may be substantially homogeneous, orthe additional dielectric structure 160 may be heterogeneous. In someembodiments, the additional dielectric structure 160 is substantiallyhomogeneous. In additional embodiments, the additional dielectricstructure 160 is heterogeneous. The additional dielectric structure 160may, for example, be formed of and include a stack of at least twodifferent dielectric materials.

While in FIG. 1B, the dielectric structure 152 and the additionaldielectric structure 160 of the connected dielectric structure 162 ofthe microelectronic device structure assembly 156 are distinguished fromone another by way of a dashed line, the dielectric structure 152 andthe additional dielectric structure 160 may be integral and continuouswith one another. Put another way, the connected dielectric structure162 may be a substantially monolithic structure including the dielectricstructure 152 as a first region (e.g., a vertically lower region)thereof, and the additional dielectric structure 160 as a second region(e.g., a vertically upper region) thereof. For the connected dielectricstructure 162, the dielectric structure 152 thereof may be attached tothe additional dielectric structure 160 thereof without a bond line.

Referring next to FIG. 1C, the additional portion 158B (FIG. 1B) of theadditional semiconductive base structure 158 (FIG. 1B) is removed whileat least partially maintaining the portion 158A (FIG. 1B) of theadditional semiconductive base structure 158 (FIG. 1B) to form asemiconductive structure 166. The semiconductive structure 166 maycomprise semiconductive material of the portion 158A (FIG. 1B) remaining(e.g., unremoved, maintained) following the removal of the additionalportion 158B (FIG. 1B) of the additional semiconductive base structure158 (FIG. 1B). A vertical dimension (e.g., height in the Z-direction) ofthe semiconductive structure 166 may be less than or equal to a verticaldimension of the portion 158A (FIG. 1B) of the additional semiconductivebase structure 158 (FIG. 1B). The semiconductive structure 166 may beemployed to form features (e.g., structures; devices, such as secondtransistors) of a second control logic region to be formed over thefirst memory array region 106, as described in further detail below.

The additional portion 158B (FIG. 1B) of the additional semiconductivebase structure 158 (FIG. 1B) may be removed using conventional processes(e.g., a detachment process; a wafer thinning process, such as agrinding processes) and conventional processing equipment, which are notdescribed in detail herein. By way of non-limiting example, in someembodiments wherein the additional semiconductive base structure 158(FIG. 1B) includes the detachment region 164 (FIG. 1B) including one ormore of dopants (e.g., hydrogen), void spaces, and/or structuralfeatures (e.g., defects, damage) promoting or facilitating subsequentdetachment of the portion 158A (FIG. 1B) from the additional portion158B (FIG. 1B), the additional semiconductive base structure 158 (FIG.1B) may be acted upon to effectuate such detachment at or proximate thedetachment region 164 (FIG. 1B)

Referring next to FIG. 1D, a second control logic region 168 may beformed over the first memory array region 106 of the microelectronicdevice structure 100. As shown in FIG. 1D, the second control logicregion 168 may include the semiconductive structure 166. Optionally, anadditional amount (e.g., additional volume) of semiconductive material(e.g., polycrystalline silicon) may be formed on the semiconductivestructure 166. In addition, the second control logic region 168 isformed to include second transistors 170, third contact structures 172,conductive routing structures 174, and fourth contact structures 176. Atleast the second transistors 170, the third contact structures 172, andthe conductive routing structures 174 may form additional control logiccircuitry of various second control logic devices 178 of the secondcontrol logic region 168, as described in further detail below. Thesecond control logic region 168 may be formed to further includeadditional features (e.g., structures, materials, devices), as alsodescribed in further detail below.

The second transistors 170 of the second control logic region 168 may beformed to include additional conductively doped regions 180 (e.g.,serving as source regions and drain regions of the second transistors170) within the semiconductive structure 166, additional channel regions182 within the semiconductive structure 166 and horizontally interposedbetween the additional conductively doped regions 180, and additionalgate structures 184 vertically overlying the additional channel regions182. The second transistors 170 may also include additional gatedielectric material (e.g., additional dielectric oxide) formed tovertically intervene (e.g., in the Z-direction) between the additionalgate structures 184 and the additional channel regions 182.

For the second transistors 170 of the second control logic region 168,the additional conductively doped regions 180 within the semiconductivestructure 166 may be doped with one or more desired dopants (e.g.,chemical species). In some embodiments, the additional conductivelydoped regions 180 are doped with at least one N-type dopant (e.g., oneor more of P, As, Sb, and Bi). In some of such embodiments, theadditional channel regions 182 within the semiconductive structure 166are doped with at least one P-type dopant (e.g., one or more of B, Al,and Ga). In some other of such embodiments, the additional channelregions 182 within the semiconductive structure 166 are substantiallyundoped. In additional embodiments, the additional conductively dopedregions 180 are doped with at least one P-type dopant (e.g., one or moreof B, Al, and Ga). In some of such additional embodiments, theadditional channel regions 182 within the semiconductive structure 166are doped with at least one N-type dopant (e.g., one or more of P, As,Sb, and Bi). In some other of such additional embodiments, theadditional channel regions 182 within the semiconductive structure 166are substantially undoped.

The additional gate structures 184 may individually horizontally extend(e.g., in the Y-direction) between and be employed by multiple secondtransistors 170 of the second control logic region 168. The additionalgate structures 184 may be formed of and include conductive material. Insome embodiments, the additional gate structures 184 are individuallyformed of and include W. The additional gate structures 184 mayindividually be substantially homogeneous, or the additional gatestructures 184 may individually be heterogeneous. In some embodiments,the additional gate structures 184 are each substantially homogeneous.In additional embodiments, the additional gate structures 184 are eachheterogeneous. Individual additional gate structures 184 may, forexample, be formed of and include a stack of at least two differentconductive materials.

Still referring to FIG. 1D, the third contact structures 172 may beformed to vertically extend between and couple the additionalconductively doped regions 180 within the semiconductive structure 166(and, hence, the second transistors 170) to one or more of theconductive routing structures 174 of the second control logic region168. The third contact structures 172 may each individually be formed ofand include conductive material. By way of non-limiting example, thethird contact structures 172 may be formed of and include one or more ofat least one metal, at least one alloy, and at least one conductivemetal-containing material (e.g., a conductive metal nitride, aconductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the third contact structures 172 areformed of and include W. In additional embodiments, the third contactstructures 172 are formed of and include Cu.

The conductive routing structures 174 may be formed over (e.g., in theZ-direction) and in electrical communication with the third contactstructures 172 and the second transistors 170 of the second controllogic region 168. The conductive routing structures 174 may eachindividually be formed of and include conductive material. By way ofnon-limiting example, the conductive routing structures 174 may beformed of and include one or more of at least one metal, at least onealloy, and at least one conductive metal-containing material (e.g., aconductive metal nitride, a conductive metal silicide, a conductivemetal carbide, a conductive metal oxide). In some embodiments, theconductive routing structures 174 are formed of and include Cu. Inadditional embodiments, the conductive routing structures 174 are formedof and include W.

As previously mentioned, the second transistors 170, the third contactstructures 172, and the conductive routing structures 174 formadditional control logic circuitry of various second control logicdevices 178 of the second control logic region 168. In some embodiments,the second control logic devices 178 comprise CMOS circuitry. The secondcontrol logic devices 178 may be configured to control variousoperations of components within the first memory array region 106 aswell as components within one or more additional memory array region(s)(e.g., a second memory array region) to subsequently be formed over thesecond control logic region 168. The second control logic devices 178may be different than (e.g., may have different configurations andoperational functions than) the first control logic devices 112. In someembodiments, the second control logic devices 178 include relativelyhigh performance control logic devices employing relatively highperformance control logic circuitry (e.g., relatively high performanceCMOS circuitry). The second control logic devices 178 may, for example,be configured to operate at applied voltages less than or equal to(e.g., less than) about 1.4 volts (V), such as within a range of fromabout 0.7V to about 1.4V (e.g., from about 0.9V to about 1.2V, fromabout 0.95V to about 1.15V, or about 1.1V).

As a non-limiting example, the second control logic devices 178 includedwithin the second control logic region 168 may include devicesconfigured to control column operations for arrays (e.g., memory arrays)within one or more (e.g., each) of the first memory array region 106 anda second memory array region to subsequently be formed, such as one ormore (e.g., each) of decoders (e.g., local deck decoders, columndecoders), sense amplifiers (e.g., EQ amplifiers, ISO amplifiers, NSAs,PSAs), repair circuitry (e.g., column repair circuitry), I/O devices(e.g., local I/O devices), memory test devices, MUX, and ECC devices. Asanother non-limiting example, the second control logic devices 178 mayinclude devices configured to control row operations for arrays (e.g.,memory arrays) within one or more (e.g., each) of the first memory arrayregion 106 (FIG. 1A) and the second memory array region to subsequentlybe formed, such as one or more (e.g., each) of decoders (e.g., localdeck decoders, row decoders), drivers (e.g., WL drivers), repaircircuitry (e.g., row repair circuitry), memory test devices, MUX, ECCdevices, and self-refresh/wear leveling devices. As a furthernon-limiting example, the second control logic devices 178 may includeone or more of string drivers and page buffers.

Still referring to FIG. 1D, one or more additional filled trenches 186(e.g., filled openings, filled vias, filled apertures) may be formed tovertically extend (e.g., in the Z-direction) at least partially (e.g.,substantially) through the semiconductive structure 166. If formed, eachof the additional filled trenches 186 may be formed to exhibitsubstantially the same dimensions (e.g., substantially the samehorizontal dimensions, substantially the same vertical dimensions) andshape (e.g., substantially the same horizontal cross-sectional shape,substantially the same vertical cross-sectional shape) as each other ofthe additional filled trenches 186, or at least one of the additionalfilled trenches 186 may be formed to exhibit one or more of differentdimensions (e.g., one or more different horizontal dimensions, one ormore different vertical dimensions) and a different shape (e.g., adifferent horizontal cross-sectional shape, a different verticalcross-sectional shape) than at least one other of the additional filledtrenches 186.

If formed, the additional filled trenches 186 may be substantiallyfilled with one or more materials, such as one or more of at least oneinsulative material, at least one conductive material, and at least onesemiconductive material. In some embodiments, at least one (e.g., each)of the additional filled trenches 186 is filled with at least oneinsulative material. At least one (e.g., each) of the additional filledtrenches 186 may, for example, be employed as a STI structure within thesemiconductive structure 166. In additional embodiments, the additionalfilled trenches 186 are not formed in (e.g., are omitted from) from thesemiconductive structure 166.

With continued reference to FIG. 1D, the fourth contact structures 176may be formed to vertically extend from one or more of the conductiverouting structures 174 and through the semiconductive structure 166. Thefourth contact structures 176 may individually be coupled to at leastone the second contact structures 126 of the first memory array region106. The fourth contact structures 176 may at least partially fill vias(e.g., through silicon vias (TSVs), through STI vias) formed tovertically extend from the conductive routing structures 174, throughthe semiconductive structure 166, and to the second contact structures126 of the first memory array region 106. One or more of the fourthcontact structures 176 may be formed to vertically extend through one ormore of the additional filled trenches 186 (e.g., STI structures) formedwithin the semiconductive structure 166. Optionally, one or more otherof the fourth contact structures 176 may be formed to vertically extendthrough one or more other regions of the semiconductive structure 166outside of horizontal boundaries of the additional filled trenches 186.

The fourth contact structures 176 may be formed of and includeconductive material. The fourth contact structures 176 may facilitateelectrical communications between the second control logic devices 178of the second control logic region 168 and components of the firstmemory array region 106 and the first control logic region 104thereunder, such as the vertically extending strings of memory cells 146within the first memory array region 106 and the first control logicdevices 112 within the first control logic region 104. In someembodiments, the fourth contact structures 176 may each individuallycomprise metallic material, such as one or more of at least one metal,at least one alloy, and at least one conductive metal-containingmaterial (e.g., a conductive metal nitride, a conductive metal silicide,a conductive metal carbide, a conductive metal oxide). In someembodiments, the fourth contact structures 176 are formed of and includeW.

Optionally, at least one insulative liner material may be formed tosubstantially continuously extend over and substantially cover sidesurfaces of one or more of the fourth contact structures 176. Theinsulative liner material may partially fill one or more vias (e.g., oneor more TSVs) containing the one or more of the fourth contactstructures 176. The insulative liner material may be horizontallyinterposed between the fourth contact structure(s) 176 and thesemiconductive structure 166. The insulative liner material may also behorizontally interposed between the fourth contact structure(s) 176 andone or more conductive structures formed in, on, or over thesemiconductive structure 166. The insulative liner material may beformed over and include at least one insulative material, such as one ormore of at least one dielectric oxide material, at least one dielectricnitride material, at least one dielectric oxynitride material, and atleast one dielectric carboxynitride material. In some embodiments, theinsulative liner material is formed of and includes at least onedielectric oxide material (e.g., SiO_(x), such as SiO₂).

Still referring to FIG. 1D, at least one additional isolation material188 may be formed to cover and surround the semiconductive structure166, as well as portions of the second transistors 170, the thirdcontact structures 172, the conductive routing structures 174, and thefourth contact structures 176. The additional isolation material 188 maybe formed of and include at least one insulative material. By way ofnon-limiting example, the additional isolation material 188 may beformed of and include one or more of at least one dielectric oxidematerial (e.g., one or more of SiO_(x), phosphosilicate glass,borosilicate glass, borophosphosilicate glass, fluorosilicate glass,AlO_(x), HfO_(x), NbO_(x), and TiO_(x)), at least one dielectric nitridematerial (e.g., SiN_(y)), at least one dielectric oxynitride material(e.g., SiO_(x)N_(y)), at least one dielectric carboxynitride material(e.g., SiO_(x)C_(z)N_(y)), and amorphous carbon. In some embodiments,the additional isolation material 188 is formed of and includes SiO_(x)(e.g., SiO₂). The additional isolation material 188 may be substantiallyhomogeneous, or the isolation material 150 may be heterogeneous. In someembodiments, the additional isolation material 188 is substantiallyhomogeneous. In additional embodiments, the additional isolationmaterial 188 is heterogeneous. The additional isolation material 188may, for example, be formed of and include a stack of at least twodifferent dielectric materials.

Referring next to FIG. 1E, a second memory array region 190 may beformed over the second control logic region 168. As shown in FIG. 1E,the second memory array region 190 may be formed to include firstconductive line structures 192 horizontally extending in theX-direction, second conductive line structures 194 horizontallyextending in the Y-direction, and resistance variable memory cells 196vertically interposed in the Z-direction between the first conductiveline structures 192 and the second conductive line structures 194. Theresistance variable memory cells 196 may be horizontally positioned atintersections (e.g., cross points) of the first conductive linestructures 192 and the second conductive line structures 194. Asdescribed in further detail below, the resistance variable memory cells196 may individually include one resistance variable material. As usedherein, the term “resistance variable material” means and includes amaterial formulated to be switched from one resistance state to anotherresistance state upon application of at least one physical signal (e.g.,at least one of heat, voltage, current, or other physical phenomena)thereto. An array of the resistance variable memory cells 196 within thesecond memory array region 190 may exhibit a so-called “cross-point”architecture. Individual rows of the resistance variable memory cells196 may extend in the X-direction along (e.g., substantially alignedwith) and coupled to individual first conductive line structures 192.Individual columns of the resistance variable memory cells 196 mayextend in the Y-direction along (e.g., substantially aligned with) andcoupled to individual second conductive lines 194.

The first conductive line structures 192 may exhibit horizontallyelongate shapes horizontally extending in parallel in the X-direction.In some embodiments, the first conductive line structures 192 eachexhibit substantially the same dimensions (e.g., width in theY-direction, length in the X-direction, height in the Z-direction),shape, and spacing (e.g., in the Y-direction). In additionalembodiments, one or more of the first conductive line structures 192exhibits one or more of at least one different dimension (e.g., adifferent length, a different width, a different height) and a differentshape than one or more other of the first conductive line structures192, and/or the spacing (e.g., in the Y-direction) between at least twohorizontally neighboring first conductive line structures 192 isdifferent than the spacing between at least two other horizontallyneighboring first conductive line structures 192.

The first conductive line structures 192 may be formed of and include atleast one conductive material, such as one or more of at least onemetal, at least one metal alloy, at least one conductive metal oxide, atleast one conductive metal nitride, at least one conductive metalsilicide, and at least one conductively doped semiconductor material.The first conductive line structures 192 may, for example, be formed ofand include one or more of W, WN, Ni, Ta, TaN, TaSi, Pt, Cu, Ag, Au, Al,Mo, Ti, TiN, TiSi, TiSiN, TiAlN, MoN, Ir, IrO_(x), Ru, RuO_(x), andconductively doped silicon. In some embodiments, the first conductiveline structures 192 are formed of and include W. In additionalembodiments, the first conductive line structures 192 are formed of andinclude Cu.

As shown in FIG. 1E, the first conductive line structures 192 mayindividually be coupled to one or more of the conductive routingstructures 174 within the second control logic region 168 by way offifth contact structures 191. Accordingly, the first conductive linestructures 192 may individually be coupled to one or more of the secondcontrol logic devices 178 within the second control logic region 168and/or to one or more of the first control logic devices 112 within thefirst control logic region 104. The fifth contact structures 191 mayeach individually be formed of and include conductive material. By wayof non-limiting example, the fifth contact structures 191 may be formedof and include one or more of at least one metal, at least one alloy,and at least one conductive metal-containing material (e.g., aconductive metal nitride, a conductive metal silicide, a conductivemetal carbide, a conductive metal oxide). In some embodiments, the fifthcontact structures 191 are formed of and include Cu. In additionalembodiments, the fifth contact structures 191 are formed of and includeW.

The second conductive line structures 194 may exhibit horizontallyelongate shapes horizontally extending in parallel in the Y-direction.In some embodiments, the second conductive line structures 194 eachexhibit substantially the same dimensions (e.g., width in theX-direction, length in the Y-direction, height in the Z-direction),shape, and spacing (e.g., in the X-direction). In additionalembodiments, one or more of the second conductive line structures 194exhibits one or more of at least one different dimension (e.g., adifferent length, a different width, a different height) and a differentshape than one or more other of the second conductive line structures194, and/or the spacing (e.g., in the Y-direction) between at least twohorizontally neighboring second conductive line structures 194 isdifferent than the spacing between at least two other horizontallyneighboring second conductive line structures 194.

The second conductive line structures 194 may be formed of and includeat least one conductive material, such as one or more of at least onemetal, at least one metal alloy, at least one conductive metal oxide, atleast one conductive metal nitride, at least one conductive metalsilicide, and at least one conductively doped semiconductor material.The second conductive line structures 194 may, for example, be formed ofand include one or more of W, WN, Ni, Ta, TaN, TaSi, Pt, Cu, Ag, Au, Al,Mo, Ti, TiN, TiSi, TiSiN, TiAlN, MoN, Ir, IrO_(x), Ru, RuO_(x), andconductively doped silicon. Material composition(s) of the secondconductive line structures 194 may be substantially the same as or maybe different than material composition(s) of the first conductive linestructures 192. In some embodiments, the second conductive linestructures 194 are formed of and include W. In additional embodiments,the second conductive line structures 194 are formed of and include Cu.

Still referring to FIG. 1E, the resistance variable memory cells 196 maybe formed to comprise one or more of RRAM cells, conductive bridge RAMcells, MRAM cells, PCM memory cells, PCRAM cells, STTRAM cells, oxygenvacancy-based memory cells, and programmable conductor memory cells. Insome embodiments, the resistance variable memory cells 196 are employedas cache memory for a memory device formed to include the first controllogic region 104, the first memory array region 106, the second controllogic region 168, and the second memory array region 190, as describedin further detail below.

As shown in FIG. 1E, in some embodiments, individual resistance variablememory cells 196 within the second memory array region 190 are formed toinclude a stack of materials including a first electrode material 198 onor over one of the first conductive line structures 192, a storageelement material 200 on or over the first electrode material 198, asecond electrode material 202 on or over the storage element material200, a select device material 204 on or over the second electrodematerial 202, and third electrode material 206 vertically interposedbetween (e.g., vertically extending from and between) the select devicematerial 204 and one of the second conductive line structures 194. Sucha configuration for one or more (e.g., each) of the resistance variablememory cells 196 is described in further detail below. In additionalembodiments, one or more (e.g., each) of the resistance variable memorycells 196 is formed to exhibit a different configuration, as is alsodescribed in further detail below. In addition, in some embodiments, aprotective liner material 208 is formed to at least partially cover andsurround the stack of materials (e.g., at least the storage elementmaterial 200 and the select device material 204, such as each of thefirst electrode material 198, the storage element material 200, thesecond electrode material 202, the select device material 204, and thethird electrode material 206); and a seal material 210 is formed to atleast partially cover and surround the protective liner material 208(and, optionally, one or more of the third electrode material 206 andthe second conductive line structures 194).

The storage element material 200 of the resistance variable memory cells196, which may also be characterized as programmable material, may beformed of and include at least one resistance variable material.Embodiments of the disclosure are not limited to a particular resistancevariable material. The storage element material 200 may, for example, beformed of and include a resistance variable material configured andformulated for one or more of RRAM, conductive bridging RAM, MRAM, PCMmemory, PCRAM, STTRAM, oxygen vacancy-based memory, and programmableconductor memory. Suitable resistance variable materials include, butare not limited to, active switching materials (e.g., solid stateelectrolyte materials, such as transition metal oxide (TMO) materials,chalcogenide materials, dielectric metal oxide materials, mixed valenceoxides including two or more metals and/or metalloids), metal ion sourcematerials, oxygen-gettering materials, phase change materials, binarymetal oxide materials, colossal magnetoresistive materials, andpolymer-based resistance variable materials.

The select device material 204 (e.g., access device material) of theresistance variable memory cells 196 may be formed of and include atleast one material configured and formulated to form a switch for thestorage element material 200 of the resistance variable memory cells196. The select device material 204 may, for example, comprise at leastone material facilitating the formation of a non-ohmic device (NOD)stack, such as one or more of at least one chalcogenide material, atleast one semiconductor material, and at least one insulative material.The NOD stack may, for example, exhibit an ovonic threshold switch (OTS)configuration, a conductor-semiconductor-conductor (CSC) switchconfiguration, a metal-insulator-metal (MIM) switch configuration, ametal-semiconductor-metal (MSM) switch configuration, ametal-insulator-insulator-metal (MIIM) switch configuration, ametal-semiconductor-semiconductor-metal (MSSM) switch configuration, ametal-insulator-semiconductor-metal (MISM) switch configuration, ametal-semiconductor-insulator-metal (MSIM) switch configuration, ametal-insulator-semiconductor-insulator-metal (MISIM) switchconfiguration, a metal-semiconductor-insulator-semiconductor-metal(MSISM) switch configuration, ametal-insulator-insulator-insulator-metal (MIIIM) switch configuration,a metal-semiconductor-semiconductor-semiconductor-metal (MSSSM) switchconfiguration, mixed ionic electronic conduction (MIEC) switchconfiguration, or another type of two-terminal select deviceconfiguration.

In some embodiments, one or more of the storage element material 200 andthe select device material 204 of the resistance variable memory cells196 is formed of and includes at least one chalcogenide material. Ifboth the storage element material 200 and the select device material 204comprise chalcogenide materials, the storage element material 200 may,for example, comprise a chalcogenide material that is capable ofundergoing a non-volatile phase change. In some such embodiments, theselect device material 204 comprises an additional chalcogenide materialthat does not undergo a similar non-volatile phase change.

In some embodiments, the storage element material 200 is formed of andincludes a phase change material having a chalcogenide compositionincluding at least two of elements within theindium(In)-antimony(Sb)-tellurium(Te) (IST) alloy system (e.g.,In₂Sb₂Te₅, In₁Sb₂Te₄, In₁Sb₄Te₇), or an at least two of elements withinthe germanium(Ge)-antimony(Sb)-tellurium(Te) (GST) alloy system (e.g.,Ge₈Sb₅Te₈, Ge₂Sb₂Te₅, Ge₁Sb₂Te₄, Ge₁Sb₄Te₇, Ge₄Sb₄Te₇). Hyphenatedchemical composition notations, as used herein, indicate the elementsincluded in a particular material, and are intended to represent allstoichiometries involving the indicated elements. In additionalembodiments, the storage element material 200 is formed of and includesa phase change material having a different chalcogenide composition,such as one or more of Ge—Te, In—Se, Sb—Te, Ga—Sb, In—Sb, As—Te, Al—Te,In—Ge-Te, Ge—Sb-Te, Te—Ge-As, In—Sb-Te, Te—Sn—Se, Ge—Se-Ga, Bi—Se—Sb,Ga—Se-Te, Sn—Sb-Te, In—Sb-Ge, Te—Ge—Sb—S, Te—Ge—Sn—O, Te—Ge—Sn—Au,Pd—Te-Ge—Sn, In—Se-Ti—Co, Ge—Sb-Te—Pd, Ge—Sb-Te—Co, Sb—Te—Bi—Se,Ag—In—Sb—Te, Ge—Sb—Se—Te, Ge—Sn—Sb—Te, Ge—Te—Sn—Ni, Ge—Te—Sn—Pd, andGe—Te—Sn—Pt.

In some embodiments, the select device material 204 has a chalcogenidecomposition. The chalcogenide composition of the select device material204 may, for example, comprise any one of the chalcogenide compositionspreviously described above for the storage element material 200.Optionally, the select device material 204 may further include anelement that suppresses crystallization, such as arsenic (As).Non-limiting examples, material compositions for the select devicematerial 204 include Te—As-Ge—Si, Ge—Te—Pb, Ge—Se-Te, Al—As-Te,Se—As-Ge—Si, Se—As-Ge—C, Se—Te-Ge—Si, Ge—Sb-Te—Se, Ge—Bi-Te—Se,Ge—As—Sb—Se, Ge—As—Bi—Te, and Ge—As—Bi—Se.

The first electrode material 198, the second electrode material 202, andthe third electrode material 206 of the resistance variable memory cells196 may each individually comprise at least one conductive material thatelectrically connects other features (e.g., materials, structures) ofthe second memory array region 190 adjacent thereto and thatsubstantially prevents undesirable reactions between materials. Forexample, if the storage element material 200 and the select devicematerial 204 of the resistance variable memory cells 196 comprisechalcogenide materials, the first electrode material 198, the secondelectrode material 202, and the third electrode material 206 may eachindividual comprise non-reactive conductive materials that substantiallyprevent interdiffusion of materials adjacent (e.g., vertically adjacent)thereto. Examples of suitable conductive materials for the firstelectrode material 198, the second electrode material 202, and the thirdelectrode material 206 include, but are not limited to, carbon (C);conductively doped silicon; metals (e.g., Al, Cu, Ni, Cr, Co, Ru, Rh,Pd, Ag, Pt, Au, Ta, W); conductive metal nitrides (e.g., TiN_(x),TaN_(x), WN_(x), and TaC_(x)N_(y)); conductive metal silicides(TaSi_(x), WSi_(x), NiSi_(x), CoSi_(x), and TiSi_(x)); and conductivemetal oxides (e.g., RuO₂). In additional embodiments, the firstelectrode material 198 is omitted (e.g., absent) from the resistancevariable memory cells 196. In such embodiments, the first conductiveline structures 192 serve as lower electrodes for the resistancevariable memory cells 196. In further embodiments, the third electrodematerial 206 is omitted (e.g., absent) from the resistance variablememory cells 196. In such embodiments, the second conductive linestructures 194 serve as upper electrodes for the resistance variablememory cells 196.

Still referring to FIG. 1E, if formed, the protective liner material 208may be formed of and include at least one material configured to protectportions of the resistance variable memory cells 196 covered thereby(e.g., the storage element material 200, the select device material 204,the first electrode material 198, the second electrode material 202)from cross contamination and configured to control associated variationsin horizontal widths of materials above and below an interface betweenthe storage element material 200 and the second electrode material 202.In some embodiments, the protective liner material 208 is formed of andincludes a fluorocarbon material. As used herein, a “fluorocarbonmaterial” means and includes a material including carbon atoms andfluorine atoms. In additional embodiments, the protective liner material208 is omitted (e.g., absent) from the second memory array region 190.For example, surfaces of the resistance variable memory cells 196 may befree of the protective liner material 208 thereon or thereover.

If formed, the seal material 210 may be formed of and include at leastone material configured to protect portions of the resistance variablememory cells 196 covered thereby during subsequent processing acts(e.g., etching acts, cleaning acts, gapfill acts, thermal treatmentacts) to maintain desired geometric configurations and properties of theresistance variable memory cells 196. In some embodiments, the sealmaterial 210 is formed of and includes at least one dielectric material,such as one or more of a dielectric oxide material (e.g., SiO_(x), suchas SiO₂; AlO_(x), such as Al₂O₃) and a dielectric nitride material(e.g., SiN_(y), such as Si₃N₄). In some embodiments, the seal material210 is formed on side surfaces (e.g., outer sidewalls) of the protectiveliner material 208, the third electrode material 206, and the secondconductive line structures 194. In additional embodiments, such asembodiments wherein the protective liner material 208 is absent, theseal material 210 is formed on side surfaces (e.g., outer sidewalls) ofthe first electrode material 198, the storage element material 200, thesecond electrode material 202, the select device material 204, the thirdelectrode material 206, and the second conductive line structures 194.

Still referring to FIG. 1E, at least one further isolation material 211may be formed to cover and surround the resistance variable memory cells196, as well as portions of the first conductive line structures 192 andthe second conductive line structures 194. The further isolationmaterial 211 may be formed of and include at least one insulativematerial. By way of non-limiting example, the further isolation material211 may be formed of and include one or more of at least one dielectricoxide material (e.g., one or more of SiO_(x), phosphosilicate glass,borosilicate glass, borophosphosilicate glass, fluorosilicate glass,AlO_(x), HfO_(x), NbO_(x), and TiO_(x)), at least one dielectric nitridematerial (e.g., SiN_(y)), at least one dielectric oxynitride material(e.g., SiO_(x)N_(y)), at least one dielectric carboxynitride material(e.g., SiO_(x)C_(z)N_(y)), and amorphous carbon. In some embodiments,the further isolation material 211 is formed of and includes SiO_(x)(e.g., SiO₂). The further isolation material 211 may be substantiallyhomogeneous, or the further isolation material 211 may be heterogeneous.In some embodiments, the further isolation material 211 is substantiallyhomogeneous. In additional embodiments, the further isolation material211 is heterogeneous. The further isolation material 211 may, forexample, be formed of and include a stack of at least two differentdielectric materials.

In additional embodiments, the second memory array region 190 is formedto exhibit a different configuration than that described above withreference to FIG. 1E. As a non-limiting example, for each of theresistance variable memory cells 196, the positions of the storageelement material 200 and the select device material 204 may be switched(e.g., interchanged with one another) relative to the positions shown inand described with reference to FIG. 1E, such that the storage elementmaterial 200 vertically overlies the select device material 204. Asanother non-limiting example, for each of the resistance variable memorycells 196, the select device material 204 may be omitted from theresistance variable memory cells 196. As a further non-limiting example,for each of the resistance variable memory cells 196, one or more of thefirst electrode material 198, the second electrode material 202, and thethird electrode material 206 may be omitted. As an additionalnon-limiting example, the orientations of the first conductive linestructures 192 and the second conductive line structures 194 switched(e.g., interchanged with one another) relative to the orientations shownin and described with reference to FIG. 1E, such that the firstconductive line structures 192 horizontally extend in parallel in theY-direction and the second conductive line structures 194 horizontallyextend in parallel in the X-direction.

Referring next to FIG. 1F, an interconnect region 212 may be formed overthe second memory array region 190. The interconnect region 212 may beformed to include first routing structures 214 vertically overlying thesecond memory array region 190, second routing structures 216 verticallyoverlying the first routing structures 214, and conductive padstructures 218 vertically overlying the second routing structures 216.The first routing structures 214 may be coupled to one or morecomponents (e.g., one or more of the second conductive line structures194) of the second memory array region 190 by way of sixth contactstructures 219. In addition, the second routing structures 216 may becoupled to the first routing structures 214 and the conductive padstructures 218 by way of seventh contact structures 220. As shown inFIG. 1F, some of the seventh contact structures 220 may verticallyextend from and between the second routing structures 216 and the firstrouting structures 214, and other of the seventh contact structures 220may vertically extend from and between the second routing structures 216and the conductive pad structures 218. In addition, still other of theseventh contact structures 220 may vertically extend from and betweenthe vertically neighboring second routing structures 216.

The first routing structures 214, the second routing structures 216, thesixth contact structures 219, the seventh contact structures 220, andthe conductive pad structures 218 may each be formed of and includeconductive material. By way of non-limiting example, first routingstructures 214, the second routing structures 216, the sixth contactstructures 219, the seventh contact structures 220, and the conductivepad structures 218 may each individually be formed of and include one ormore of at least one metal, at least one alloy, and at least oneconductive metal-containing material (e.g., a conductive metal nitride,a conductive metal silicide, a conductive metal carbide, a conductivemetal oxide). In some embodiments, the first routing structures 214 andthe second routing structures 216 are each formed of and include Cu; theconductive pads structures 218 are formed of and include Al; and thesixth contact structures 219 and the seventh contact structures 220 areeach formed of and include W.

Still referring to FIG. 1F, at least one other isolation material 222may be formed to cover and surround the first routing structures 214,the second routing structures 216, the sixth contact structures 219, theseventh contact structures 220, and the conductive pad structures 218.The other isolation material 222 may be formed of and include at leastone insulative material. By way of non-limiting example, the otherisolation material 222 may be formed of and include one or more of atleast one dielectric oxide material (e.g., one or more of SiO_(x),phosphosilicate glass, borosilicate glass, borophosphosilicate glass,fluorosilicate glass, AlO_(x), HfO_(x), NbO_(x), and TiO_(x)), at leastone dielectric nitride material (e.g., SiN_(y)), at least one dielectricoxynitride material (e.g., SiO_(x)N_(y)), at least one dielectriccarboxynitride material (e.g., SiO_(x)C_(z)N_(y)), and amorphous carbon.In some embodiments, the other isolation material 222 is formed of andincludes SiO_(x) (e.g., SiO₂). The other isolation material 222 may besubstantially homogeneous, or the other isolation material 222 may beheterogeneous. In some embodiments, the other isolation material 222 issubstantially homogeneous. In additional embodiments, the otherisolation material 222 is heterogeneous. The other isolation material222 may, for example, be formed of and include a stack of at least twodifferent dielectric materials.

As shown in FIG. 1F, the formation of the interconnect region 212 mayeffectuate the formation of a microelectronic device 224 (e.g., a memorydevice). The microelectronic device 224 may include the first controllogic region 104, the first memory array region 106 vertically overlyingthe first control logic region 104, the second control logic region 168vertically overlying the first memory array region 106, the secondmemory array region 190 vertically overlying the second control logicregion 168, and the interconnect region 212 vertically overlying thesecond memory array region 190. In some embodiments, at least some ofthe first routing structures 214 of the interconnect region 212 areemployed as local routing structures for the microelectronic device 224,and at least some of the second routing structures 216 and theconductive pad structures 218 are employed as global routing structuresfor the microelectronic device 224. The second routing structures 216and the conductive pad structures 218 may, for example, be configured toreceive global signals from an external bus, and to relay the globalsignals to other components (e.g., structures, devices) of themicroelectronic device 224.

The configuration of the microelectronic device 224 may facilitateenhanced device performance (e.g., speed, data transfer rates, powerconsumption) relative to conventional microelectronic deviceconfiguration. The microelectronic device 224 combines the advantages ofresistance variable memory configurations and 3D NAND Flash memoryconfigurations within a single structure (e.g., a single die),facilitating, for example, the use of the resistance variable memory forrelatively high speed, cache memory operations of the microelectronicdevice 224, and the use of the 3D NAND Flash memory for additionalmemory operations of the microelectronic device. In addition, the methoddescribed above with reference to FIGS. 1A through 1F resolveslimitations on array (e.g., memory cell array) configurations, controllogic device configurations, and associated device performance that mayotherwise result from thermal budget constraints imposed by theformation and/or processing of arrays (e.g., memory cell arrays) of amicroelectronic device. For example, by forming the second control logicregion 168 and the second memory array region 190 subsequent to theformation of the microelectronic device structure 100 including thefirst control logic region 104 and the first memory array region 106,configurations of the first control logic devices 112 of the firstcontrol logic region 104 and the strings of memory cells 146 of thefirst memory array region 106 are not limited by the processingconditions (e.g., temperatures, pressures, materials) required to formthe second control logic devices 178 of the second control logic region168 and the resistance variable memory cells 196 of the second memoryarray region 190.

Thus, in accordance with embodiments of the disclosure, a method offorming a microelectronic device comprises forming a microelectronicdevice structure comprising a first control logic region comprisingfirst control logic devices, and a first memory array region verticallyoverlying the first control logic region and comprising an array ofvertically extending strings of memory cells. An additionalmicroelectronic device structure comprising a semiconductive material isattached to an upper surface of the microelectronic device structure. Aportion of the semiconductive material is removed. A second controllogic region is formed over the first memory array region. The secondcontrol logic region comprises second control logic devices and aremaining portion of the semiconductive material. A second memory arrayregion is formed over the second control logic region. The second memoryarray region comprises an array of resistance variable memory cells.

Furthermore, in accordance with embodiments of the disclosure, amicroelectronic device comprises a first control logic region, a firstmemory array region overlying the first control logic region, a secondcontrol logic region overlying the first memory array region, and asecond memory array region overlying the second control logic region.The first control logic region comprises first control logic devices.The first memory array region comprises a stack structure comprising avertically alternating sequence of conductive structures and insulativestructures, and vertically extending strings of memory cells within thestack structure and in electrical communication with the first controllogic devices of the first control logic region. The second controllogic region comprises second control logic devices in electricalcommunication with the first control logic devices and the verticallyextending strings of memory cells. The second memory array regioncomprises resistance variable memory cells in electrical communicationwith the first control logic devices and the second control logicdevices.

Furthermore, in accordance with embodiments of the disclosure, a memorydevice comprises a stack structure, vertically extending strings ofmemory cells within the stack structure, resistance variable memorycells overlying the stack structure, control logic devices comprisingcomplementary metal-oxide-semiconductor (CMOS) circuitry underlying thestack structure, and additional control logic devices comprisingadditional CMOS circuitry vertically interposed between the stackstructure and the resistance variable memory cells. The stack structurecomprises tiers each comprising a conductive structure and an insulativestructure vertically neighboring the conductive structure. The controllogic devices are configured to effectuate a portion of controloperations for the vertically extending strings of memory cells and theresistance variable memory cells. The additional control logic deviceshave relatively lower operational voltage requirements than the controllogic devices, and are configured to effectuate an additional portion ofthe control operations for the vertically extending strings of memorycells and the resistance variable memory cells.

Microelectronic devices (e.g., the microelectronic device 224 (FIG. 1F))in accordance with embodiments of the disclosure may be used inembodiments of electronic systems of the disclosure. For example, FIG. 2is a block diagram of an illustrative electronic system 300 according toembodiments of disclosure. The electronic system 300 may comprise, forexample, a computer or computer hardware component, a server or othernetworking hardware component, a cellular telephone, a digital camera, apersonal digital assistant (PDA), portable media (e.g., music) player, aWi-Fi or cellular-enabled tablet such as, for example, an iPad® orSURFACE® tablet, an electronic book, a navigation device, etc. Theelectronic system 300 includes at least one memory device 302. Thememory device 302 may comprise, for example, a microelectronic device(e.g., the microelectronic device 224 (FIG. 1F)) previously describedherein. The electronic system 300 may further include at least oneelectronic signal processor device 304 (often referred to as a“microprocessor”). The electronic signal processor device 304 may,optionally, comprise a microelectronic device (e.g., the microelectronicdevice 224 (FIG. 1F)) previously described herein. While the memorydevice 302 and the electronic signal processor device 304 are depictedas two (2) separate devices in FIG. 2 , in additional embodiments, asingle (e.g., only one) memory/processor device having thefunctionalities of the memory device 302 and the electronic signalprocessor device 304 is included in the electronic system 300. In suchembodiments, the memory/processor device may include a microelectronicdevice (e.g., the microelectronic device 224 (FIG. 1F)) previouslydescribed herein. The electronic system 300 may further include one ormore input devices 306 for inputting information into the electronicsystem 300 by a user, such as, for example, a mouse or other pointingdevice, a keyboard, a touchpad, a button, or a control panel. Theelectronic system 300 may further include one or more output devices 308for outputting information (e.g., visual or audio output) to a user suchas, for example, a monitor, a display, a printer, an audio output jack,a speaker, etc. In some embodiments, the input device 306 and the outputdevice 308 comprise a single touchscreen device that can be used both toinput information to the electronic system 300 and to output visualinformation to a user. The input device 306 and the output device 308may communicate electrically with one or more of the memory device 302and the electronic signal processor device 304.

Thus, in accordance with embodiments of the disclosure, an electronicsystem comprises an input device, an output device, a processor deviceoperably connected to the input device and the output device, and amemory device operably connected to the processor device. The memorydevice comprises a stack structure, a source structure, digit linestructures, strings of memory cells, resistance variable memory cells,control logic devices, additional control logic devices, and conductiverouting structures. The stack structure comprises conductive structuresvertically alternating with insulative structures. The source structureunderlies the stack structure. The digit line structures overlie thestack structure. The strings of memory cells vertically extend throughthe stack structure and are coupled to the source structure and thedigit line structures. The control logic devices vertically underlie thesource structure and are coupled to the strings of memory cells and theresistance variable memory cells. The additional control logic devicesare vertically between the digit line structures and the resistancevariable memory cells and are coupled to the strings of memory cells andthe resistance variable memory cells. The conductive routing structuresoverlie the resistance variable memory cells and are coupled to thecontrol logic devices and the additional control logic devices.

The structures, devices, and methods of the disclosure advantageouslyfacilitate one or more of improved microelectronic device performance,reduced costs (e.g., manufacturing costs, material costs), increasedminiaturization of components, and greater packaging density as comparedto conventional structures, conventional devices, and conventionalmethods. The structures, devices, and methods of the disclosure may alsoimprove scalability, efficiency, and simplicity as compared toconventional structures, conventional devices, and conventional methods.

While the disclosure is susceptible to various modifications andalternative forms, specific embodiments have been shown by way ofexample in the drawings and have been described in detail herein.However, the disclosure is not limited to the particular formsdisclosed. Rather, the disclosure is to cover all modifications,equivalents, and alternatives falling within the scope of the followingappended claims and their legal equivalent. For example, elements andfeatures disclosed in relation to one embodiment may be combined withelements and features disclosed in relation to other embodiments of thedisclosure.

What is claimed is:
 1. A method of forming a microelectronic device,comprising: forming a microelectronic device structure comprising: afirst control logic region comprising first control logic devices; and afirst memory array region vertically overlying the first control logicregion and comprising an array of vertically extending strings of memorycells; attaching an additional microelectronic device structurecomprising a semiconductive material to an upper surface of themicroelectronic device structure; removing a portion of thesemiconductive material; forming a second control logic region over thefirst memory array region, the second control logic region comprisingsecond control logic devices and a remaining portion of thesemiconductive material; and forming a second memory array region overthe second control logic region, the second memory array regioncomprising an array of resistance variable memory cells.
 2. The methodof claim 1, wherein forming a microelectronic device structure comprisesforming the first memory array region of the microelectronic devicestructure to further comprise: at least one source structure; a stackstructure over the at least one source structure and comprising avertically alternating sequence of conductive structures and insulativestructures, the array of vertically extending strings of memory cellslocated within the stack structure and coupled to the at least onesource structure; and digit line structures over the stack structure andcoupled to the array of vertically extending strings of memory cells. 3.The method of claim 2, wherein forming a second memory array region overthe second control logic region comprises forming the second memoryarray region to further comprise: first conductive line structures overthe second control logic region and under the array of resistancevariable memory cells, the first conductive line structures extending inparallel in a first horizontal direction; and second conductive linestructures over the array of resistance variable memory cells andextending in parallel in a second horizontal direction orthogonal to thefirst horizontal direction, each resistance variable memory cell of thearray of resistance variable memory cells horizontally positioned at anintersection of one of the first conductive line structures and one ofthe second conductive line structures.
 4. The method of claim 1,wherein: attaching an additional microelectronic device structurecomprises bonding a dielectric material of the additionalmicroelectronic device structure adjacent to the semiconductive materialto an additional dielectric material of the microelectronic devicestructure; and removing a portion of the semiconductive materialcomprises detaching an upper portion of the semiconductive material toleave the dielectric material and the remaining portion of thesemiconductive material.
 5. The method of claim 1, wherein forming asecond control logic region over the first memory array region comprisesforming transistors of the second control logic devices partially withinand from the remaining portion of the semiconductive material.
 6. Themethod of claim 1, wherein forming a second control logic region overthe first memory array region comprises forming the second control logicdevices of the second control logic region to have differentconfigurations and operational functions than the first control logicdevices of the first control logic region.
 7. The method of claim 6,wherein forming the second control logic devices of the second controllogic region to have different configurations and operational functionsthan the first control logic devices of the first control logic regioncomprises forming the second control logic devices to operate at appliedvoltages within a range of from about 0.7V to about 1.4 V.
 8. The methodof claim 7, further comprising forming the first control logic devicesof the first control logic region to comprise additional CMOS circuitryconfigured to operate at other applied voltages greater than the appliedvoltages effective to operate of the second control logic devices of thesecond control logic region.
 9. The method of claim 1, wherein forming asecond memory array region over the second control logic regioncomprises forming the array of resistance variable memory cells of thesecond memory array region to be in electrical communication with thesecond control logic devices of the second control logic region and thefirst control logic devices of the first control logic region.
 10. Themethod of claim 1, further comprising forming an interconnect regionover the second memory array region, the interconnect region comprising:conductive routing structures overlying the second memory array region;and conductive pad structures overlying and in electrical communicationwith the conductive routing structures.
 11. A microelectronic device,comprising: a first control logic region comprising first control logicdevices; a first memory array region overlying the first control logicregion and comprising: stack structure comprising a verticallyalternating sequence of conductive structures and insulative structures;and vertically extending strings of memory cells within the stackstructure and in electrical communication with the first control logicdevices of the first control logic region; a second control logic regionoverlying the first memory array region and comprising second controllogic devices in electrical communication with the first control logicdevices and the vertically extending strings of memory cells; and asecond memory array region overlying the second control logic region andcomprising resistance variable memory cells in electrical communicationwith the first control logic devices and the second control logicdevices.
 12. The microelectronic device of claim 11, wherein the firstmemory array region further comprises: at least one source structurevertically interposed between and in electrical communication with thevertically extending strings of memory cells and the first control logicdevices; and digit line structures vertically overlying and between andin electrical communication with the vertically extending strings ofmemory cells.
 13. The microelectronic device of claim 11, wherein thesecond control logic devices of the second control logic region areconfigured to effectuate different operational functions for thevertically extending strings of memory cells of the first memory arrayregion and the resistance variable memory cells of the second memoryarray region than the first control logic devices of the first controllogic region.
 14. The microelectronic device of claim 13, wherein: thesecond control logic devices of the second control logic region areconfigured to operate at applied voltages within a range of from about0.7V to about 1.4V; and the first control logic devices of the firstcontrol logic region are configured to operate at additional appliedvoltages greater than the applied voltages.
 15. The microelectronicdevice of claim 11, wherein each memory cell of the vertically extendingstrings of memory cells of the first memory array region comprises ametal-oxide-nitride-oxide-semiconductor (MONOS) memory cell.
 16. Themicroelectronic device of claim 11, wherein each resistance variablememory cell of the second memory array region comprises a storageelement comprising a solid state electrolyte material.
 17. Themicroelectronic device of claim 16, wherein the solid state electrolytematerial comprises a chalcogenide material.
 18. The microelectronicdevice of claim 11, wherein the second memory array region comprises:rows of the resistance variable memory cells vertically over and inphysical contact with first conductive line structures extending in afirst horizontal direction; and columns of the resistance variablememory cells vertically under and in physical contact with secondconductive line structures extending in a second horizontal directionperpendicular to the first horizontal direction.
 19. The microelectronicdevice of claim 11, further comprising: conductive routing structuresvertically overlying the second memory array region and in electricalcommunication with one or more of the first control logic devices of thefirst control logic region and the second control logic devices of thesecond control logic region; and conductive pad structures verticallyoverlying and in electrical communication with the conductive routingstructures.
 20. A memory device, comprising: a stack structurecomprising tiers each comprising a conductive structure and aninsulative structure vertically neighboring the conductive structure;vertically extending strings of memory cells within the stack structure;resistance variable memory cells overlying the stack structure; controllogic devices comprising complementary metal-oxide-semiconductor (CMOS)circuitry underlying the stack structure, the control logic devicesconfigured to effectuate a portion of control operations for thevertically extending strings of memory cells and the resistance variablememory cells; and additional control logic devices comprising additionalCMOS circuitry vertically interposed between the stack structure and theresistance variable memory cells, the additional control logic deviceshaving relatively lower operational voltage requirements than thecontrol logic devices and configured to effectuate an additional portionof the control operations for the vertically extending strings of memorycells and the resistance variable memory cells.
 21. The memory device ofclaim 20, further comprising: at least one source structure verticallyinterposed between the stack structure and the control logic devices,the at least one source structure in electrical communication with thevertically extending strings of memory cells; and digit line structuresvertically interposed between the stack structure and the additionalcontrol logic devices, the digit line structures in electricalcommunication with the vertically extending strings of memory cells. 22.The memory device of claim 21, further comprising: first conductive linestructures vertically interposed between the additional control logicdevices and the resistance variable memory cells and extending in afirst horizontal direction, the first conductive line structures inelectrical communication with the resistance variable memory cells; andsecond conductive line structures vertically overlying and in inelectrical communication with the resistance variable memory cells, thesecond conductive line structures extending in a second horizontaldirection orthogonal to the first horizontal direction.
 23. The memorydevice of claim 22, wherein the at least one source structure, the digitline structures, the first conductive line structures, and the secondconductive line structures are in electrical communication with thecontrol logic devices and the additional control logic devices.
 24. Thememory device of claim 20, further comprising: conductive routingstructures vertically overlying the resistance variable memory cells andin electrical communication with the control logic devices and theadditional control logic devices; and conductive pad structuresvertically overlying and in electrical communication with the conductiverouting structures.
 25. An electronic system, comprising: an inputdevice; an output device; a processor device operably connected to theinput device and the output device; and a memory device operablyconnected to the processor device and comprising: a stack structurecomprising conductive structures vertically alternating with insulativestructures; a source structure underlying the stack structure; digitline structures overlying the stack structure; strings of memory cellsvertically extending through the stack structure and coupled to thesource structure and the digit line structures; resistance variablememory cells overlying the digit line structures; control logic devicesvertically underlying the source structure and coupled to the strings ofmemory cells and the resistance variable memory cells; additionalcontrol logic devices vertically between the digit line structures andthe resistance variable memory cells and coupled to the strings ofmemory cells and the resistance variable memory cells; and conductiverouting structures overlying the resistance variable memory cells andcoupled to the control logic devices and the additional control logicdevices.